BOC announces technology initiative for PFC recovery and purification

BOC announces technology initiative for PFC recovery and purification

Murray Hill, NJ

In response to the industry initiative to recover and recycle PFCs, BOC is developing technology for recovering and purifying PFCs in high concentration. The PFCs are used by semiconductor manufacturers for etching and chamber cleaning. According to officials, the new solution will ultimately purify and certify captured PFCs to meet the same standards as current new material. Several purifiers are already in commercial operation, and a pilot unit has been developed for recovering PFCs from the process tool. — SES

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