PRI introduces fully-integrated automation system for 300 mm

PRI introduces fully-integrated automation system for 300 mm

Billerica, MA

At SEMICON/West, PRI Automation, Inc. announced the industry`s first 300 mm wafer fab automated material handling solution. According to the company, PRI`s product set provides process-tool-to-process-tool material transport and loading, addressing the full range of 300 mm material-handling requirements throughout the fab, including interbay, intrabay, and front-end tool automation. Accompanying the new system is an integrated suite of software products for scaleable solutions to meet individual customer requirements. The company has already begun shipping front-end systems and expects to have the full product range in the hands of early adapter fab customers in 1998. — SES

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