Open wafer cassette
The new KA300 from Fluoroware is a light 300 mm wafer cassette that is designed to be a transport cassette in Japan and a transitional cassette for other chip manufacturers worldwide. It incorporates all SEMI standard 2471 automation interface criteria including, ± 0.5 mm wafer plane precision, kinematic coupling as the primary equipment interface, 10 mm wafer spacing and a 6 mm wafer lift zone. It weighs 980 grams without wafers and 2605 grams when it is at full capacity of 13 wafers. The KA300 is made of Fluoroware`s static protective material, STAT-PRO 3000 carbon-filled polyetheretherketone. STAT-PRO 3000 carriers generate fewer particles than previous generation carriers, the company claims. The cassette is injection-molded in a single piece for dimensional precision and reliability. It features the industry standard 10 mm pitch and SEMI standard 2470 kinematic coupling.