A cleanroom-compatible excimer laser from Lambda Physik, Inc. — The NovaLine 100 — will be showcased at MD&M. The high-power excimer laser, used in applications including high-speed PCB via drilling, wire stripping and component marking, delivers 100 W of stabilized output power, 400 mJ of pulse energy, and a 250 Hz repetition rate at 248 nm. It takes up a minimum amount of floor space. The company will also showcase its NovaLine LITHO — an economic excimer laser for 248-nm lithography. The laser features 1 kHz repetition rate, < 0.8 pm bandwidth, 10 W stabilized output power (optional < 250 pm, 15 W).
Lambda Physik Inc., Ft. Lauderdale, FL