Patents awarded for advanced wafer drying system

Patents awarded for advanced wafer drying system

Fremont, CA

AIO Corp. (Fremont, CA) was awarded three patents for its Sonic Fog IPA substrate drying technology, a liquid phase IPA drying system. The semiconductor, disk drive and flat panel display industries use the system to completely dry substrates from sizes ranging from 50 mm wafers to 0.5 sq. m. glass panels. — LAK

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