Air Products upgrades operations to better serve semiconductor industry

Air Products upgrades operations to better serve semiconductor industry

Allentown, PA

Air Products and Chemicals, Inc. recently authorized a multimillion-dollar upgrade of its electronics specialty gas facility in Hometown, PA. Scheduled for completion by the end of 1998, the upgrade will enhance procedures for manufacturing five ultra high-purity semiconductor processing gases — hydrogen chloride, boron trichloride, ammonia, hydrogen bromide and chlorine. Facility improvements are being made in key areas such as residual gas treatment, cylinder reconditioning and the comprehensive filling process for the gases. These improvements will help expand the company`s capabilities for producing bulk specialty gases, including bulk hydrogen chloride which is widely used as an etchant in the final steps of wafer processing.

Air Products has also opened a new technical center in Chester, VA, to service semiconductor manufacturers in the Richmond area. The 3,250-square-foot center contains a cylinder storage site and offers full support capabilities, including analytical services, high-purity welding, start-up and maintenance for GASGUARD cabinets and valve manifold boxes and spare parts inventory. — TGW

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