Equipes 300 mm robotics earn users international certification

Equipe`s 300 mm robotics earn users international certification

Sunnyvale, CA

The robotic front-end buffer systems manufactured by Equipe Technologies, Inc. has earned users certification from the International 300 mm Initiative (I300I), a global consortium directing the semiconductor industry`s shift to larger wafers. Three companies, whose 300 mm wafer processing tools incorporate the components, achieved I300I compliance using Equipe`s ABM400 series robotic arm, its PRE300 series wafer pre-aligner and TRA series single-axis tracks with ESC series controllers. I300I testing showed that the atmos pheric front-end buffer systems exceeded Class 1 cleanliness requirements. — TGW

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