Exhaust pressure launcher

Exhaust pressure launcher

A series of exhaust pressure controllers from Aera Corp. is designed to maintain constant pressure in a process chamber in order to ensure repeatable process results. Three different modules are available: the R100, R150 and the R200. The valves in each design have a simple one-body structure giving the module a fully integrated, single-body combination of control valves, controllers and pressure sensors for applications, including oxidation diffusion, CVD systems, annealers and spincoaters. The exhaust pressure-controller is designed to control a slightly negative pressure in the outlet line between an atmospheric pressure process chamber and an exhaust duct. The module can also respond to a wide range of inputs and gain settings and can set a time constant to determine optimal control.

Aera Corp.

Austin, TX

(512) 339-7100


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