Fujitsu favors SMIFs at new fab
Mie, Japan
Fujitsu Ltd. is planning on introducing SMIF-type minienvironments into a new 200 mm wafer fab in Mie, Japan. This is the first time a Japanese manufacturer has used this technology in a full production environment, according to Jenoptik Infab, the fab automation contractor. Says Toshihko Osada, Fujitsu`s general manager in its Manufacturing Engineering Division: “Minienvironments are not being used in Japan, but the concept makes sense to us. We are not even considering open cassettes when it comes to 300 mm production, so this project is intended to familiarize us with the technology of the future.” — LAK