Solid State patents double brush scrub

Solid State patents double brush scrub

Horsham, PA

Solid State Equipment Corp. has received a U.S. patent on its double brush scrubbing system that is utilized in the company`s Evergreen wafer cleaners/processors. The double brush scrubs wafers simultaneously on top and bottom while they are rotated by the motion of the brushes. Wafers ride on air bearings, eliminating spin chuck surface contact or marking. — TGW

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