Air Products doubles specialty gas production

Air Products doubles specialty gas production

Lehigh Valley, PA

Air Products and Chemicals Inc. has expanded operations at its electronic specialty gas manufacturing facility in Hometown, PA. The company doubled production of tungsten hexafluoride (WF6) to approximately 140,000 pounds per year to meet increased demand for the product by semiconductor manufacturers worldwide. The fluorinated chemical is used in integrated circuits as a metalization source for the formation of tungsten plug interconnects between multiple layers in the devices. — TGW

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