Applied Materials, SEMATECH team up to develop advanced SEM-based system
Santa Clara, CA
Applied Materials Inc. and SEMA TECH have joined efforts to develop an advanced Scanning Electron Microscope (SEM)-based automatic defect classification system for use on future semiconductor wafers with feature sizes of 0.18 micron and below. Tool development is underway at Applied Materials. Production testing is expected to take place this year at one or more SEMATECH-member company fabs. — TGW