Temperature monitor

Temperature monitor

The Thermal Track/TC is used with CVD and RTP process tools and logs thermocouple temperature data in real time from 17 sensors embedded in wafers to provide direct in situ wafer temperature measurement. Applications include checking and adjusting pyrometer calibrations; troubleshooting for temperature-related process problems; and running predefined preventive maintenance checks tailored to customer equipment configurations.

SensArray Corp.

Santa Clara, CA

(408) 727-4656


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