Chemical cart
Smart Cart is a chemical transfer system that allows users to collect a chemical from a bulk supply and to transport, dispense and blend that chemical with DI water at the desired concentration to tools at numerous locations within a fab. It operates under PLC control and is powered by a rechargeable battery pack. The transfer tank is constructed from 316 stainless steel or PVDF. All other components subject to contact with chemicals are constructed from materials compatible with most chemicals used in the semiconductor industry.
Semco Corp.
Livermore, CA
(925) 371-4170