The QualiTorr Orion Compact (QOC) Resid-ual Gas Analysis (RGA) system features a small foot print for base pressure RGA, leak detecting, and high-vacuum process monitoring. It can used in single-chamber tools or on cluster tools to provide monitoring in loadlock chambers and base-pressure testing of process chambers. The QOC system handles process monitoring in evaporation, molecular beam epitaxy and ion implant as well as other HV processing applications. It can be configured with a vacuum housing, heater jacket and vacuum isolation valve and is powered by an external 24-volt supply. It interfaces with a host computer through an RS-422 communications port.
MKS Instruments Inc.