The VacuLaz in-situ particle monitor measures contaminants in exhaust lines of process chambers and loadlocks. Particle counts from single wafers, batches of wafers or individual processing steps can be plotted for analysis. The system consists of a viewing module, a sensor and an electronics interface module, allowing operators to view in real-time raw particle counts in a time series plot or according to customized specifications. Sizing sensitivity for the VacuLaz sensor starts at 0.2 micron. According to the manufacturer, the system is compatible with most corrosive gases used in vacuum processing environments.
Particle Measuring Systems Inc.