Pressure transducer

Pressure transducer

The Type 631A absolute heated 200 degrees Celsius baratron pressure transducer provides condensation protection for high-temperature advanced semiconductor processes using new process chemistries such as low k dielectric. The transducers prevent condensation of process gases with high sublimation temperatures to minimize contamination buildup on the sensor and particle generation, according to the manufacturer. They are compatible with chemistries processed at high temperatures, including titanium nitride, tantalum nitride, and tungsten nitride CVD materials.

MKS Instruments Inc.

Andover, MA

(978) 975-2350


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