TEOS monitor

TEOS monitor

This monitoring system detects and measures TEOS, a silicon source, and is made to respond to potentially hazardous leaks and releases. According to the manufacturer, the system measures TEOS concentrations as low as 1 PPM yet does not react to alcohol-based cleaning solvents such as IPA, and its low-level measurement accuracy is not affected by changes in temperature or humidity.

PureAire Monitoring Systems Inc.

Rolling Meadows, IL

(847) 788-8000


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