Amine filters

Amine filters

VaporSorb Profile 1250 filters are made for ASML PAS 5500/300 and /500 series DUV exposure tools. According to the manufacturer, the filters produce discharge amine levels <200 parts per trillion, five times lower than the one part-per-billion requirement for a one-hour, post-exposure delay using Apex E. The filters are about half the size of conventional filters and can be suspended with the supply air ductwork for the stepper, scanner or track.

Extraction Systems Inc.

Franklin, MA

(508) 553-3900


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