Disposable filters
The Impact LHVD is a disposable, compact, no-drip filter for point-of-use photochemical filtration. According to the manufacturer, it minimizes exposure to photochemicals during changeout, while delivering low particle-on-wafer performance for I-line and DUV processes. The filter incorporates a patented hollow fiber membrane that is compatible with most photoresists.
Millipore Corp.
Bedford, MA
(781) 533-6000