Disposable filters

Disposable filters

The Impact LHVD is a disposable, compact, no-drip filter for point-of-use photochemical filtration. According to the manufacturer, it minimizes exposure to photochemicals during changeout, while delivering low particle-on-wafer performance for I-line and DUV processes. The filter incorporates a patented hollow fiber membrane that is compatible with most photoresists.

Millipore Corp.

Bedford, MA

(781) 533-6000


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