Vacuum inlet trap

Vacuum inlet trap

The Multi-Trap 3-stage vacuum inlet trap removes corrosives and abrasives that can destroy vacuum pumps in vacuum-based manufacturing or laboratory systems. It is suited for use in tetraethoxysilane (TEOS), nitride, low-temperature oxide (LTO), high-temperature oxide (HTO) and plasma etch processes. A stainless steel knock-down stage and two parallel stages, each containing five to eight filter elements, trap heavy particles and condensables, according to the manufacturer. It can be customized by selecting specific filters, replacing several smaller traps with one trap for protecting pumps and systems, and preventing exhaust line clogging. Filter elements include copper or stainless steel gauze, molecular sieve, activated charcoal, activated alumina, Sodasorb and pleated polypropylene.

MV Products

Division of Mass-Vac

N. Billerica, MA

(978) 667-2393


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