Flow verifiers

Flow verifiers

These Gas Box Rate-of-Rise (GBROR) in situ flow verifiers are made to address the needs of flat panel display CVD equipment and high-flow semiconductor manufacturing applications. According to the manufacturer, they cover flow ranges from 100 sccm to 20 slm and include a gas stick with a patented Baratron capacitance manometer and a calibrated volume incorporated as part of the tool gas box.

MKS Instruments

Andover, MA

(978) 975-2350


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