Tosoh earns EPAT certification
Grove City, OH
The Solo EPT target from Tosoh SMD has achieved Level III certification in the Applied Materials Enhanced Performance Aluminum Target (EPAT) program. The certification ensures that targets meet stringent guidelines for metallurgical properties and low-defect generation. The one-piece Solo EPT is manufactured using a proprietary process that results in a homogenous microstructure with reduced precipitate content; controlled crystallography; and sub-100 micron fine grain size. — TGW