Wafer temperature monitor
The palm-sized Thermal Track instrument enables users to conduct direct multipoint wafer temperature measurements to monitor thermal cycles in lithography, CVD, RTP and other semiconductor processes in real time. According to the manufacturer, this computer is half the size and weight of its predecessor and runs five times as long on its lithium-ion battery. New software features include a strip chart display of temperature versus time for each temperature sensor location on the wafer, and for some applications, double the data acquisition rate to 100 ms. Absolute accuracy is ۪.1-degree Celsius with point-to-point profile precision to ۪.05-degree Celsius.
SensArray, Santa Clara, CA