Equipment Purchase — March 23, 2000 — SiGen and Akrion Announce Tool Qualification Alliance

CAMPBELL, CA—SiGen will team with Akrion to qualify production-worthy wet cleaning recipes for its NanoCleave silicon-on-insulator wafer fabrication process. The two companies say they will qualify Akrion's wet bench system for use with the Silicon Genesis (SiGen) technology; then they will integrate the system into SiGen's production process.

By Lisa Nadile


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