Products — March 20, 2000 — Sitek Markets TCS Vaporizer for Epitaxial Wafer Manufacturing

TEMPE, AZ—A new liquid metering and vaporization system from Sitek is available to epitaxial wafer manufacturers for controlling silicon during deposition. According to the company, its TCS Flash Vaporizer measures and vaporizes trichlorosilane (TCS), the principle source of silicon for polysilicon and epitaxial silicon reactors.

By Lisa Nadile


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