Products — March 21, 2000 — Berkeley Process Control Offers 300-mm Wafer Management

RICHMOND, CA—Berkeley Process Control OEMs are now marketing a wafer management system for 300-mm fabs. The system consists of two loadports, two wafer-handling robots, two pre-aligners, and dual twist and rotate stations from a central controller, rather than the more linear approach espoused by competitors, says Brian Fisher, marketing manager for Berkeley.

By Lisa Nadile


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