AUSTIN, TXInternational SEMATECH has evaluated the success of low-k dielectric films to produce single-level copper damascene test structures. These tests are the first phase of such work, and focused on films with a dielectric constant between 3.0 to 2.1. In addition, the organization also tested a number of tools used to fabricate devices using these materials.
By Lisa Nadile
PACIFIC GROVE, CAIntrabay Automation, a factory automation startup, will partner with Mannesmann Rexroth to bring its Class 1 wafer stocker to market. In addition, Intrabay officials say the alliance will allow them to take advantage of team manufacturing, sales, and marketing with the Mannesmann Group’s drive and control technology subsidiary.