Technology — March 14, 2000 — SEMATECH Tests the Fabrication Success of Low-k Dielectric Films

AUSTIN, TX—International SEMATECH has evaluated the success of low-k dielectric films to produce single-level copper damascene test structures. These tests are the first phase of such work, and focused on films with a dielectric constant between 3.0 to 2.1. In addition, the organization also tested a number of tools used to fabricate devices using these materials.

By Lisa Nadile

PACIFIC GROVE, CA—Intrabay Automation, a factory automation startup, will partner with Mannesmann Rexroth to bring its Class 1 wafer stocker to market. In addition, Intrabay officials say the alliance will allow them to take advantage of team manufacturing, sales, and marketing with the Mannesmann Group’s drive and control technology subsidiary.


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