Carl Zeiss to Deliver Advanced Optics to International SEMATECH and Extreme Ultraviolet LLC

MUNICH, Germany—May 30, 2000—International SEMATECH, Carl Zeiss, and the EUV LLC announced a program to demonstrate advanced optics for extreme ultraviolet lithography. Carl Zeiss will deliver the optics to the Extreme Ultraviolet (EUV) LLC and the Virtual National Laboratory in the second quarter of 2000.

By pennNET Staff


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