Lucent To Test Applied’s Single-wafer Processing Products

MURRAY HILL, N.J. –May 5, 2000–Lucent is considering the feasibility of switching to single-wafer processing from batch furnaces as a way to speed fab cycle time, and will evaluate such tools from Applied Materials. The company is testing Applied Materials Inc.'s equipment for rapid thermal annealing, the growth of oxide thin films, and the deposition of silicon nitride and polysilicon thin films.

By Michael Sciannamea


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