Cymer Flourine Laser UltraTech’s New Lithography Tool

SAN DIEGO, CA—June 12, 2000—Cymer announced last week the shipment of its first ELX-6500F2 laser to Ultratech Stepper. The company also announced it received a follow-on order for the laser from Ultratech Stepper Inc., but the companies did not disclose the dollar value of the order.

By Jeanne Graham


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