Cymer Receives Additional Funding From SEMATECH

SAN DIEGO, Calif.—June 22, 2000—Cymer has received additional funding from International SEMATECH to develop of production-worthy lasers for lithography applications. Cymer and International SEMATECH have been running tests to evaluate long-term optical damage commonly associated with lasers at the 193 nm wavelength. During testing, scientists at Cymer discovered an optical damage mechanism requiring further research on the actual characterization of optical materials crucial to the success of this technology.

By pennNET Staff


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