Nanometrics Introduces SEMI Interface Standardized NanoSpec 9200

SUNNYVALE, Calif.—June 20, 2000—Metrology systems manufacturer Nanometrics has introduced the NanoSpec 9200 for automated film processes. The system is standardized to the new SEMI standard E95-0200 Human Interface Standard for semiconductor manufacturing equipment. This standard requires a user interface that is globally applicable.

By Michael Sciannamea


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