3M Specialty Materials Introduces Safer Cleaning Gas and Dielectric Fluid

SEMICON West '00—July 14, 2000—The Specialty Materials division of 3M showcased its new enviro-friendly gas and fluid products in San Francisco, Calif. this week. The two products shown were a perfluorocarbon (PFC) gas used to clean semiconductor chambers named 3M Specialty Gas PFG-3480, and a dielectric fluid used in heat transfer applications named HFE-7500.

By Stephanie J. Levy


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