Cluster Processing Tool Developed for High Volume ECD Copper Processing

KALISPELL, MT—July 10, 2000—Semitool Inc. has introduced the Paragon line, a new collection of copper ECD tools for high volume processing. According to the company, the Paragon products are a flexible, configurable, cluster tool for copper interconnect deposition. They also feature a small footprint to save space.

By Michael Sciannamea


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