By pennNET staff
SEMICON West ’00July 13, 2000In San Jose, Calif., Ion Systems introduced a ceiling emitter featuring optional e-Diagnostics capability for remote monitoring. The product is equipped with the company’s digital iCON technology, an interactive communications platform for electrostatics management.
The Model 5511 is the latest addition to the company’s 5500 series. It features individual emitter addressability for controlling operating parameters not only at the emitter, but also at the controller, according to Ion officials. The tool meets operation requirements for a Class 1 cleanroom environment and permits precise adjustments to the ionizer balance without disrupting laminar airflow, they say.