KLA-Tencor Introduces New 300mm Defect Inspection System

SEMICON West '00—July 17, 2000—Last week KLA-Tencor Corp. unveiled three new defect inspection solutions that the company says upgrades the throughput and detection sensitivity for 0.13 and 0.10 µm production. The eS20XP, the 2350, and the AIT III are designed to identify the critical defects associated with the new 300mm processes and materials.

By pennNET Staff


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