The NanoSpec 9100 is a new addition to the company's NanoSpec 9000 line. This announcement follows those of the N2000, 9200, and 9300 film metrology systems. The 9100 is a standalone film metrology system with deep-ultraviolet (DUV) to near-infrared spectroscopic ellipsometry, DUV to visible reflectometry, and Fourier transform infrared (FTIR) technology.
By pennNET staff