Nanometrics Debuts NanoSpec 9100 Automated Film Metrology System

The NanoSpec 9100 is a new addition to the company's NanoSpec 9000 line. This announcement follows those of the N2000, 9200, and 9300 film metrology systems. The 9100 is a standalone film metrology system with deep-ultraviolet (DUV) to near-infrared spectroscopic ellipsometry, DUV to visible reflectometry, and Fourier transform infrared (FTIR) technology.

By pennNET staff


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