SVG Introduces New Rapid Thermal Furnace

SEMICON West '00—July 14, 2000—Silicon Valley Group (SVG) has introduced Xcelerate, a rapid thermal furnace designed for ion implant activation anneals where higher anneal temperatures activate more of the dopant while maintaining thermal budget requirements.

By Stephanie J. Levy

POST A COMMENT

Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.