3-D Simulation Software Calculates Cluster Tool Throughput

BOUNTIFUL, Utah—Aug. 28, 2000—A new simulation tool for substrate manufacturing systems is now available from AutoSimulations, a division of Brooks Automation. ClusterSim is a 3-D animation software for cluster tools, including process modules clustered directly to equipment front-end modules (EFEM), according to the company.

By pennNET Staff


Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.