Atmosphere control
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The invention provides an uncontaminated respirable atmosphere in a cleanroom. The system has a liquefied breathable gas supply, a liquid filtering means, a vaporizer and a gas-filter. According to the inventor, the method and apparatus make it possible to filter out the coarser particles from the liquid as it leaves the source. The filtered liquid can then be piped close to the point of use before starting a heat exchange process, allowing the liquid to vaporize and expand. The resulting gas can then be filtered to remove any remaining particles, leaving an ultra-clean gas for introduction into the cleanroom. Moreover, filtered gas can be introduced at a temperature that can provide a cooling effect, counteracting heat generated by people, machines and/or processes and could even eliminate the need for air conditioning.
Patent number: 6,055,816
Date granted: May 2, 2000
Inventor: Stephen Norman Waldron,
The BOC Group plc (Windlesham, UK)
Exhaust system
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The apparatus has a compartment located near the process chamber. A load mechanism is used to carry wafers into the chamber, and a fan exhausts gas dissipation from the wafers. An unload mechanism is used to carry the wafers out of the process chamber, and another fan carries wafer dissipation away. A chassis is provided to accommodate the load mechanism. The exhaust system is made up of two inlets secured to the fans.
Patent number: 6,054,014
Date granted: April 25, 2000
Inventor: Yu-Yun Chung, Vanguard International
Semiconductor Corp. (Hsinchu, Taiwan)
Air shower and gown
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The apparatus and method reduces particles and other contaminants that may be inadvertently introduced to a restricted area or cleanroom.
The gown has elastic within leg and arm cuffs that keeps the gown in place during an air wash.
The object of the air wash is to inflate the gown with (air) jet ports while the operator is in the air shower and to eject particles and contaminants that may be entrained or caught in the gown fabric.
Patent number: 6,062,976
Date granted: May 16, 2000
Inventor: Joselito De Guzman,
Micronova Manufacturing Inc. (Torrance, CA)
Rope sling cover
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The cover is designed for a wire rope sling that encloses the length of the loop strap and prevents particles from being scraped off its soft nylon coating.
The cover is removable so the sling can be inspected, and is secured with a zipper that runs the length of the cover and connects to the sling at both ends by straps, such as tie wraps.
Patent number: 6,059,335
Date granted: May 9, 2000
Inventor: Erik F. Matson,
TRW Inc. (Redondo Beach, CA)
Fire detector
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The device has a microprocessor-controlled detector with at least three sensors. A wide-band infrared sensor is the primary detector, with near band and visible band sensors that detect false-alarm sources. Digital signals are used to analyze data and prevent false alarms. The detector can be enclosed in a sealed, removable plastic housing that may include a plastic window lens. The detector is designed for environments where products are coated or painted. Those environments include petrochemical refineries, semiconductor fabs and automobile manufacturers.
Patent number: 6,057,549
Date granted: May 2, 2000
Inventor: David Castleman, Fire Sentry Corp. (Brea, CA)
Noise-attenuating air diffuser
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The diffuser has a frame that has been adapted for connection to the end of an air supply duct. Mounted within the frame is a flat, open-weave fabric sheet of polytetrafluoroethylene. The fabric sheet redirects and scatters air passing through the openings in the weave by changing the direction of the air upon exiting the sheet. According to the inventor, the fabric absorbs noise that would be generated as air passes through HVAC systems.
Patent number: 6,059,655
Date granted: May 9, 2000
Inventor: Keith Koerber,
Chemfab Corp. (Merrimack, NH)
Send your inventions
Information on the patents highlighted here was obtained through the U.S. Patent and Trademark Office. Inventors who have been granted patents within the last six months for new cleanroom and contamination control technology are encouraged to submit them to CleanRooms magazine for publication. Send a brief description of the invention along with a detailed drawing to Mark A. DeSorbo, associate editor, CleanRooms, 98 Spit Brook Road, Nashua, NH 03062, or e-mail at [email protected].