Nova Introduces NovaScan 2020C

REHOVOTH, Israel—Aug. 14, 2000—Nova Measuring Instruments Ltd. has introduced copper capabilities for its 2nd generation Integrated Thickness Measurement (ITM) system, the NovaScan 2020C, for copper CMP. Copper CMP integrated Process Control capabilities are being beta tested on the existing NovaScan systems.

By pennNET Staff


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