ADE files suit against KLA-Tencor

Westwood, Massachusetts–Oct. 13–A patent infringement lawsuit has been filed by ADE Corp., a supplier of wafer measurement and inspection systems to the silicon manufacturing industry, against KLA-Tencor Corp.

The suit alleges that KLA-Tencor infringed n U.S. Patent No. 6,118,525, titled “Wafer Inspection System for Distinguishing Pits and Particles.”


Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.