ADE files suit against KLA-Tencor

Westwood, Massachusetts–Oct. 13–A patent infringement lawsuit has been filed by ADE Corp., a supplier of wafer measurement and inspection systems to the silicon manufacturing industry, against KLA-Tencor Corp.

The suit alleges that KLA-Tencor infringed n U.S. Patent No. 6,118,525, titled “Wafer Inspection System for Distinguishing Pits and Particles.”

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