Lehigh Valley, Pennsylvania–GlobiTech Inc., the world’s first dedicated CMOS epitaxial foundry, has selected Air Products and Chemicals, Inc. to supply industrial and specialty gases, equipment, and operating and maintenance services to its Sherman, Texas facility.
Under the 10-year contract, valued at US$30 million over the term, Air Products will supply its GASGUARD bulk specialty gas supply systems for hydrogen chloride and trichlorosilane; dopants, including arsine, phosphine and diborane; liquid nitrogen, oxygen and hydrogen; GASGUARD gas cabinets; and on-site operating and maintenance services to the fab.
GlobiTech’s 125,000-sq-ft facility, with two 8,000-sq-ft Class 1 cleanrooms, is scheduled to begin providing epitaxial deposition services in 2001. Air Products will begin supplying the required gas products and related services in January.
“As an epi foundry, GlobiTech is committed to providing epi wafers to our customers’ design specifications at a cost-effective price while also providing them with an uninterrupted supply of product,” noted Jerry Smith, CEO and president of GlobiTech. “Air Products was selected as our supplier because of their strong commitment and capability which will best support us on these critical foundry elements. In addition, they have the global presence necessary to supply our expansion needs.”
Founded in 1998, GlobiTech Incorporated is privately funded by U.S. and Taiwan semiconductor industry investors. The company forecasts annual capacity of its initial factory to reach the equivalent of five million 200mm epitaxial wafers within 3 years of production.