TOKYO — Dec. 1, 2000 — Tokyo Electron Limited, a supplier of semiconductor and LCD production equipment, and Nikon Corporation, a leading optical and precision manufacturer, have entered into an agreement to share cleanrooms for coater developers and exposure tools.

Under the newly-penned deal, Tokyo Electron Limited plans to install its 300 mm coater/developer – the Clean Track Act 12 – at the cleanroom in the Nikon Kumagaya plant. At the same time, Nikon plans to install the NSR-S305B model scanner in a cleanroom that will be established in the Koshi Plant of Tokyo Electron Kyushu Limited.

The facility sharing is expected to begin in fiscal year 2001. According to officials, the agreement is based on the understanding that in the current semiconductor environment where many manufacturers are increasingly moving toward smaller geometries, Tokyo Electron Limited must also adopt the trend.

The two companies also plant to establish similar relationships with other manufacturing equipment manufacturers to increase user support.