Newport, U.K.–Trikon Technologies, Inc. has signed a commercial supply agreement with ASM International N.V., of Bilthoven, The Netherlands, in which Trikon will supply ASM with sputter etch modules and, in turn, ASM will supply Trikon with atomic layer chemical vapor deposition (ALCVD) modules for integration onto Trikon’s cluster tools.
“We are very pleased to enter into this agreement with Trikon,” says Daniel Queyssac, president and chief operating officer of ASM’s Front-End Businesses. “This supply agreement offers us an opportunity to speed up the introduction of our atomic layer deposition technology in the semiconductor market. We expect that this agreement will enhance our leadership position in ultra-thin films through our patented ALCVD processes by offering integrated sputter etch functionality.”
“Atomic layer deposition has an important part to play in the future of copper/damascene barriers,” says Trikon President and CEO Nigel Wheeler. “ASM is clearly the technology leader, and we have therefore secured them as a source of atomic layer deposition technology. By integrating ASM’s ALCVD modules with Trikon’s physical vapor deposition and sputter etch technologies, our cluster tools will provide advanced functionality for the most advanced applications.”
The first shipment of Trikon’s sputter etch modules to ASM took place in December 2000.