Brooks Automation ships 2,000th 300mm load port

February 12, 2001–Chelmsford, Massachusetts–Brooks Automation, Inc. today announced that it has shipped its 2,000th 300mm Load Port FIXLOAD to the Sez Group. The tool uses front opening unified pod (FOUP) technology, which is standard for 300mm wafer production.

“Providing our fab customers with the cleanest, most state-of-the-art process tools is our uppermost objective,” says Alexander Ulrich, strategic purchasing manager at SEZ AG in Austria. “When selecting our supplier, we require excellent specification data, highest quality and outstanding service to achieve superior cleanliness, throughput, and reliability for our tools. Because we know that the FIXLOAD is one of the most widely accepted 300mm Load Ports among our fab customers, we have chosed Brooks’ as one of our main Load Port suppliers. Since integrating the FIXLOAD in our equipment, we have been able to deliver a superior ‘Comprehensive Clean Concept’ to our fab customers. With the FIXLOAD’s outstanding particle per wafer pass concept, our equipment fulfills our fab customers’ strict cleanliness class requirements.”

The tool was supplied by Brooks Automation’s Factory Interface Business Unit in Jena, Germany.


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