February 15, 2001–Fremont, California–Lam Research Corp. yesterday announced the shipment of its 1,000th post-CMP clean system. The Lam Synergy Integra clean system, which is integrated with Lam’s Teres CMP system, was delivered to Philips Semiconductor’s San Antonio, Texas facility, where it will be used for post-CMP clean following direct-polish shallow trench isolation.
In addition to direct-polish STI, Philips also uses the Lam Synergy for all other post-CMP production applications. Philips is using the advanced Synergy cleaning processes to manufacture ASIC devices for the wireless communications, networking, and consumer products industries.
“The shipment of this Synergy Integra is an important milestone for Lam, confirming that Synergy Integra is the industry’s de facto standard for integrated post-CMP clean,” says Kevin Crofton, Lam’s CMP/Clean deputy general manager. “Philips uses Lam’s cleaning systems for all of its post-CMP clean applications. Despite the fact that other cleaning options are now available, users of competing CMP systems continue to request the Synergy Integra for post-CMP clean.”
“We have purchased Lam Synergy systems to add capacity for direct STI and ILD post polish clean, while also enabling some advanced development in our clean technology below 0.25 micron,” says Albert Liu, Philips’ CMP processing mnager. “This particular unit is installed on our Lam Teres’ CMP system, which was brought in to improve our STI CMP process. The Lam cleaners have been and will continue to be our tools of record for post-CMP clean.”