February 27, 2001–Langen, Germany–Nikon Corp., a leader in semiconductor optical manufacturing equipment, and Tower Semiconductor Ltd., an Israel-based specialized wafer foundry, announced today that Tower has selected Nikon’s DUV scanner systems and i-line steppers for its new fab, known as “Fab 2.”
Nikon will supply Tower with two systems–NSR-2205i14E2 i-line stepper and NSR-S204B scanner system–for Tower’s 0.18-micron pilot line. As Tower ramps up capacity in Fab 2 during the second half of 2002, Nikon will provide it with models NSR-S205C scanning steppers and NSR-2205i14E2 i-line steppers and/or NSR-SF110 wide-field steppers. The total value of the agreement is expected to reach or exceed $150 million over the next 4 years.
Tower recently broke ground on Fab 2, adjacent to its current facility in Migdal Haemek, Israel. The new fab will employ approximately 1,000 workers, and produce as many as 33,000 200mm wafers per month in geometries of 0.18-micron and below using advanced CMOS technology from Toshiba.